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A three-dimensional atomic scale simulations of CVD-SiC film growth in {1 1 1}, {1 1 0} and {1 0 0} family of planes
Cuixia Liu, Yanqing Yang, Xian LuoVolume:
50
Year:
2011
Language:
english
Pages:
2347
DOI:
10.1016/j.commatsci.2011.03.008
File:
PDF, 1.74 MB
english, 2011