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Grain-scale growth simulation of SiC film with the Chemical Vapor Deposition method
Cuixia Liu, Yanqing Yang, Xian LuoVolume:
59
Year:
2012
Language:
english
Pages:
133
DOI:
10.1016/j.commatsci.2012.03.005
File:
PDF, 696 KB
english, 2012