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QSS-μPCD measurement of lifetime in silicon wafers: advantages and new applications
Marshall Wilson, Alexandre Savtchouk, Jacek Lagowski, Krisztian Kis-Szabo, Ferenc Korsos, Atilla Toth, Radovan Kopecek, Valentin MihailetchiVolume:
8
Year:
2011
Language:
english
Pages:
135
DOI:
10.1016/j.egypro.2011.06.113
File:
PDF, 2.18 MB
english, 2011