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Laser doping using phosphorus-doped silicon nitrides
B. Paviet-Salomon, S. Gall, R. Monna, S. Manuel, A. Slaoui, L. Vandroux, R. Hida, S. DechenauxVolume:
8
Year:
2011
Language:
english
Pages:
706
DOI:
10.1016/j.egypro.2011.06.204
File:
PDF, 288 KB
english, 2011