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Optimised Antireflection Coatings using Silicon Nitride on Textured Silicon Surfaces based on Measurements and Multidimensional Modelling
Shubham Duttagupta, Fajun Ma, Bram Hoex, Thomas Mueller, Armin G. AberleVolume:
15
Year:
2012
Language:
english
Pages:
84
DOI:
10.1016/j.egypro.2012.02.009
File:
PDF, 535 KB
english, 2012