Optimised Antireflection Coatings using Silicon Nitride on...

Optimised Antireflection Coatings using Silicon Nitride on Textured Silicon Surfaces based on Measurements and Multidimensional Modelling

Shubham Duttagupta, Fajun Ma, Bram Hoex, Thomas Mueller, Armin G. Aberle
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Volume:
15
Year:
2012
Language:
english
Pages:
84
DOI:
10.1016/j.egypro.2012.02.009
File:
PDF, 535 KB
english, 2012
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