Fine-Tuning of Relative Fraction of Amorphous and Crystalline Phases in Hydrogenated Silicon Prepared by PE-CVD Method
A.M. Funde, V.S. Waman, M.M. Kamble, M.R. Pramod, S.P. Gore, G.R. Roze, V.G. Sathe, S.W. Gosavi, S.R. JadkarVolume:
15
Year:
2012
Pages:
240
DOI:
10.1016/j.egypro.2012.02.027
File:
PDF, 1.23 MB
2012