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Simulation of the Anneal of Ion Implanted Boron Emitters and the Impact on the Saturation Current Density
A. Florakis, T. Janssens, E. Rosseel, B. Douhard, J. Delmotte, E. Cornagliotti, J. Poortmans, W. VandervorstVolume:
27
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.egypro.2012.07.058
File:
PDF, 1017 KB
english, 2012