Impact of Thermal Treatment on PECVD Al2O3 Passivation Layers
S. Kühnhold, B. Kafle, L. Kroely, P. Saint-Cast, M. Hofmann, J. Rentsch, R. PreuVolume:
27
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.egypro.2012.07.063
File:
PDF, 438 KB
english, 2012