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Parameter optimization of continuous sputtering process based on Taguchi methods, neural networks, desirability function, and genetic algorithms
Hung-Chun Lin, Chao-Ton Su, Chi-Ching Wang, Bing-Hung Chang, Rei-Cheng JuangVolume:
39
Year:
2012
Language:
english
DOI:
10.1016/j.eswa.2012.05.032
File:
PDF, 315 KB
english, 2012