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Raman studies on nanocomposite silicon carbonitride thin film deposited by r.f. magnetron sputtering at different substrate temperatures
Arnab Sankar Bhattacharyya, Suman Kumari MishraVolume:
41
Year:
2010
Language:
english
Pages:
6
DOI:
10.1002/jrs.2588
File:
PDF, 282 KB
english, 2010