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Raman characterization of the structural evolution in amorphous and partially nanocrystalline hydrogenated silicon thin films prepared by PECVD
Zhi Li, Wei Li, Yadong Jiang, Haihong Cai, Yuguang Gong, Jian HeVolume:
42
Year:
2011
Language:
english
Pages:
7
DOI:
10.1002/jrs.2711
File:
PDF, 428 KB
english, 2011