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Near-field enhanced femtosecond laser nano-drilling of glass substrate
Y. Zhou, M.H. Hong, J.Y.H. Fuh, L. Lu, B.S. Lukyanchuk, Z.B. WangVolume:
449
Year:
2008
Language:
english
DOI:
10.1016/j.jallcom.2006.02.110
File:
PDF, 578 KB
english, 2008