Oxidation of PECVD SiNx thin films

Oxidation of PECVD SiNx thin films

Neerushana Jehanathan, Byron Walmsley, Yinong Liu, John Dell
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Volume:
437
Year:
2007
Language:
english
DOI:
10.1016/j.jallcom.2006.08.004
File:
PDF, 1.24 MB
english, 2007
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