Low temperature growth of c-axis oriented AlN films on γ-LiAlO2 by radio frequency magnetron sputtering
Hao Teng, Shengming Zhou, Hui Lin, Taohua Huang, Ping Han, Rong ZhangVolume:
469
Year:
2009
Language:
english
DOI:
10.1016/j.jallcom.2008.01.104
File:
PDF, 1.40 MB
english, 2009