Optimization of Zn1−xAlxO film for antireflection coating by RF sputtering
K.P. Bhuvana, J. Elanchezhiyan, N. Gopalakrishnan, T. BalasubramanianVolume:
473
Year:
2009
Language:
english
DOI:
10.1016/j.jallcom.2008.06.035
File:
PDF, 530 KB
english, 2009