Effect of assistant RF plasma on structure and properties...

Effect of assistant RF plasma on structure and properties of SiCN thin films prepared by RF magnetron sputtering of SiC target

W.L. Li, J.L. Yang, Y. Zhao, W.D. Fei
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Volume:
482
Year:
2009
Language:
english
DOI:
10.1016/j.jallcom.2009.04.008
File:
PDF, 199 KB
english, 2009
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