Property improvement of copper films with zirconium...

Journal of Alloys and Compounds 2009 Vol. 486; Iss. 1-2

Property improvement of copper films with zirconium additive for ULSI interconnects

Ying Wang, Xiao-dong Yang, Zhong-xiao Song, Yun-tao Liu
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Volume:
486
Year:
2009
Language:
english
DOI:
10.1016/j.jallcom.2009.06.185
File:
PDF, 772 KB
english, 2009
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