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The correlation of the results of capacitance mapping and of sheet resistance mapping in semi-insulating 6H–SiC
Shenghuang Lin, Zhiming Chen, Peng Liang, Dong Jiang, Huajie Xie, Ying YangVolume:
489
Year:
2010
Language:
english
DOI:
10.1016/j.jallcom.2009.07.070
File:
PDF, 517 KB
english, 2010