Chemical vapour deposition and atomic layer deposition of amorphous and nanocrystalline metallic coatings: Towards deposition of multimetallic films
Elisabeth Blanquet, Arnaud Mantoux, Michel Pons, Constantin VahlasVolume:
504
Year:
2010
Language:
english
DOI:
10.1016/j.jallcom.2010.03.205
File:
PDF, 152 KB
english, 2010