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Effects of oxygen addition on physical properties of ZnO thin film grown by radio frequency reactive magnetron sputtering
Che-Wei Hsu, Tsung-Chieh Cheng, Chun-Hui Yang, Yi-Ling Shen, Jong-Shinn Wu, Sheng-Yao WuVolume:
509
Year:
2011
Language:
english
DOI:
10.1016/j.jallcom.2010.10.037
File:
PDF, 393 KB
english, 2011