Ru incorporation on marked enhancement of diffusion...

Ru incorporation on marked enhancement of diffusion resistance of multi-component alloy barrier layers

Shou-Yi Chang, Chen-Yuan Wang, Ming-Ku Chen, Chen-En Li
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Volume:
509
Year:
2011
Language:
english
DOI:
10.1016/j.jallcom.2010.11.124
File:
PDF, 2.11 MB
english, 2011
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