Interficial stability of Cu/Cu(Ru)/Si contact system for...

Journal of Alloys and Compounds 2011 Vol. 509; Iss. 19

Interficial stability of Cu/Cu(Ru)/Si contact system for barrier-free copper metallization

Ying Wang, Mi-lin Zhang, Fei Cao, Yun-tao Liu, Lei Shao
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
509
Year:
2011
Language:
english
DOI:
10.1016/j.jallcom.2011.02.150
File:
PDF, 557 KB
english, 2011
Conversion to is in progress
Conversion to is failed