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Facile fabrication of ordered Si1−xGex nanostructures via hybrid process of selective epitaxial growth (SEG) and self-assembled nanotemplates
Sang-Joon Park, Inchan Hwang, Heung Soon Lee, Sunggi Baik, Hyungjun KimVolume:
536
Year:
2012
Language:
english
DOI:
10.1016/j.jallcom.2012.04.107
File:
PDF, 1.45 MB
english, 2012