The influence of N2/H2 and ammonia N source materials on...

Journal of Crystal Growth 2011 Vol. 335; Iss. 1

The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition

Mustafa Alevli, Cagla Ozgit, Inci Donmez, Necmi Biyikli
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Volume:
335
Year:
2011
Language:
english
DOI:
10.1016/j.jcrysgro.2011.09.003
File:
PDF, 1.57 MB
english, 2011
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