Nitrogen reaction with silicon: Investigation of Si...

Nitrogen reaction with silicon: Investigation of Si undercooling and Si3N4 growth

M. Beaudhuin, K. Zaidat, T. Duffar, M. Lemiti
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Volume:
336
Year:
2011
Language:
english
DOI:
10.1016/j.jcrysgro.2011.09.036
File:
PDF, 1022 KB
english, 2011
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