AlN homoepitaxial growth on sublimation-AlN substrate by...

Journal of Crystal Growth 2012 Vol. 350; Iss. 1

AlN homoepitaxial growth on sublimation-AlN substrate by low-pressure HVPE

Takuya Nomura, Kenta Okumura, Hideto Miyake, Kazumasa Hiramatsu, Osamu Eryu, Yoichi Yamada
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Volume:
350
Year:
2012
Language:
english
DOI:
10.1016/j.jcrysgro.2011.12.025
File:
PDF, 427 KB
english, 2012
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