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Numerical investigation of oxygen impurity distribution during multicrystalline silicon crystal growth using a gas flow guidance device
Ying-Yang Teng, Jyh-Chen Chen, Chung-Wei Lu, Chi-Yung ChenVolume:
360
Year:
2012
Language:
english
DOI:
10.1016/j.jcrysgro.2011.12.064
File:
PDF, 2.27 MB
english, 2012