Growth of thick AlN epilayers with droplet-free and atomically smooth surface by plasma-assisted molecular beam epitaxy using laser reflectometry monitoring
V.N. Jmerik, A.M. Mizerov, D.V. Nechaev, P.A. Aseev, A.A. Sitnikova, S.I. Troshkov, P.S. Kop'ev, S.V. IvanovVolume:
354
Year:
2012
Language:
english
DOI:
10.1016/j.jcrysgro.2012.06.025
File:
PDF, 762 KB
english, 2012