Properties of amorphous ZrOx thin films deposited by...

Properties of amorphous ZrOx thin films deposited by filtered cathodic vacuum arc

Daniel H.C. Chua, W.I. Milne, Z.W. Zhao, B.K. Tay, S.P. Lau, T. Carney, R.G. White
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Volume:
332
Year:
2003
Language:
english
DOI:
10.1016/j.jnoncrysol.2003.09.016
File:
PDF, 323 KB
english, 2003
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