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Properties of amorphous ZrOx thin films deposited by filtered cathodic vacuum arc
Daniel H.C. Chua, W.I. Milne, Z.W. Zhao, B.K. Tay, S.P. Lau, T. Carney, R.G. WhiteVolume:
332
Year:
2003
Language:
english
DOI:
10.1016/j.jnoncrysol.2003.09.016
File:
PDF, 323 KB
english, 2003