Deposition and characterization of silicon oxynitride for...

Journal of Non-Crystalline Solids 2004 Vol. 338-340; Iss. none

Deposition and characterization of silicon oxynitride for integrated optical applications

M.I. Alayo, D. Criado, L.C.D. Gonçalves, I. Pereyra
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Volume:
338-340
Year:
2004
Language:
english
DOI:
10.1016/j.jnoncrysol.2004.02.025
File:
PDF, 262 KB
english, 2004
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