![](/img/cover-not-exists.png)
Defects and structure of hydrogenated microcrystalline silicon films deposited by different techniques
A.L.B. Neto, T. Dylla, S. Klein, T. Repmann, A. Lambertz, R. Carius, F. FingerVolume:
338-340
Year:
2004
Language:
english
DOI:
10.1016/j.jnoncrysol.2004.02.046
File:
PDF, 296 KB
english, 2004