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Properties of polycrystalline silicon films obtained by rapid thermal processing for micromechanical sensors
D. Girginoudi, A. Mitsinakis, M. Kotsani, N. Georgoulas, A. Thanailakis, A.G. Kontos, V.C. Stergiou, Y.S. RaptisVolume:
343
Year:
2004
Language:
english
DOI:
10.1016/j.jnoncrysol.2004.07.007
File:
PDF, 584 KB
english, 2004