Properties of polycrystalline silicon films obtained by...

Properties of polycrystalline silicon films obtained by rapid thermal processing for micromechanical sensors

D. Girginoudi, A. Mitsinakis, M. Kotsani, N. Georgoulas, A. Thanailakis, A.G. Kontos, V.C. Stergiou, Y.S. Raptis
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
343
Year:
2004
Language:
english
DOI:
10.1016/j.jnoncrysol.2004.07.007
File:
PDF, 584 KB
english, 2004
Conversion to is in progress
Conversion to is failed