From monosilane to crystalline silicon. Part III....

Journal of Non-Crystalline Solids 2005 Vol. 351; Iss. 14-15

From monosilane to crystalline silicon. Part III. Characterization of amorphous, hydrogen-containing silicon products

Jan Ove Odden, Per Kristian Egeberg, Arne Kjekshus
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Volume:
351
Year:
2005
Language:
english
DOI:
10.1016/j.jnoncrysol.2004.11.024
File:
PDF, 250 KB
english, 2005
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