An investigation of the role of plasma conditions on the...

An investigation of the role of plasma conditions on the deposition rate of electrochromic vanadium oxide thin films

Michael Seman, Joey Marino, Wenli Yang, Colin A. Wolden
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Volume:
351
Year:
2005
Language:
english
DOI:
10.1016/j.jnoncrysol.2005.05.016
File:
PDF, 180 KB
english, 2005
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