Effect of oxygen content on barrier properties of silicon oxide thin film deposited by dual ion-beam sputtering
Jin-Wook Seong, Dai Won Choi, K.H. YoonVolume:
352
Year:
2006
Language:
english
DOI:
10.1016/j.jnoncrysol.2005.10.024
File:
PDF, 411 KB
english, 2006