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Comparative study of ITO layers deposited by DC and RF magnetron sputtering at room temperature
F. Kurdesau, G. Khripunov, A.F. da Cunha, M. Kaelin, A.N. TiwariVolume:
352
Year:
2006
Language:
english
DOI:
10.1016/j.jnoncrysol.2005.11.088
File:
PDF, 291 KB
english, 2006