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Plasma enhanced chemical vapor deposition of ZnO thin films
P.K. Shishodia, H.J. Kim, A. Wakahara, A. Yoshida, G. Shishodia, R.M. MehraVolume:
352
Year:
2006
Language:
english
DOI:
10.1016/j.jnoncrysol.2006.01.086
File:
PDF, 246 KB
english, 2006