Structure and properties of hydrogenated amorphous silicon carbide thin films deposited by PECVD
Yiying Zhang, Piyi Du, Ran Zhang, Gaorong Han, Wenjian WengVolume:
354
Year:
2008
Language:
english
DOI:
10.1016/j.jnoncrysol.2006.11.047
File:
PDF, 178 KB
english, 2008