Three-dimensional high-aspect-ratio recording in resist

Three-dimensional high-aspect-ratio recording in resist

Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis, Hiroaki Misawa
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Volume:
354
Year:
2008
Language:
english
DOI:
10.1016/j.jnoncrysol.2006.11.048
File:
PDF, 511 KB
english, 2008
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