Three-dimensional high-aspect-ratio recording in resist
Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis, Hiroaki MisawaVolume:
354
Year:
2008
Language:
english
DOI:
10.1016/j.jnoncrysol.2006.11.048
File:
PDF, 511 KB
english, 2008