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Identification of spatial localization and energetic position of electrically active defects in amorphous high-k dielectrics for advanced devices
H. García, S. Dueñas, H. Castán, L. Bailón, K. Kukli, J. Aarik, M. Ritala, M. LeskeläVolume:
354
Year:
2008
Language:
english
DOI:
10.1016/j.jnoncrysol.2007.07.049
File:
PDF, 199 KB
english, 2008