Influence of plasma power and substrate temperature on...

Influence of plasma power and substrate temperature on structure of nanocrystalline germanium carbon thin films by VHF plasma CVD

Yasutoshi Yashiki, Seiichi Kouketsu, Shinsuke Miyajima, Akira Yamada, Makoto Konagai
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Volume:
354
Year:
2008
Language:
english
DOI:
10.1016/j.jnoncrysol.2007.10.056
File:
PDF, 211 KB
english, 2008
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