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Influence of plasma power and substrate temperature on structure of nanocrystalline germanium carbon thin films by VHF plasma CVD
Yasutoshi Yashiki, Seiichi Kouketsu, Shinsuke Miyajima, Akira Yamada, Makoto KonagaiVolume:
354
Year:
2008
Language:
english
DOI:
10.1016/j.jnoncrysol.2007.10.056
File:
PDF, 211 KB
english, 2008