Influence of LPE process technological conditions on Si ELO...

Influence of LPE process technological conditions on Si ELO layers morphology

J.M. Olchowik, S. Gulkowski, K. Cieslak, I. Jozwik, A. Fave, A. Kaminski
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Volume:
354
Year:
2008
Language:
english
DOI:
10.1016/j.jnoncrysol.2008.06.039
File:
PDF, 240 KB
english, 2008
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