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On angle resolved RF magnetron sputtering of Ge–Sb–Te thin films
J. Gutwirth, T. Wágner, P. Bezdička, M. Hrdlička, Mil. Vlček, M. FrumarVolume:
355
Year:
2009
Language:
english
DOI:
10.1016/j.jnoncrysol.2009.04.060
File:
PDF, 570 KB
english, 2009