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Influence of the nitrogen flow rate on the order and structure of PECVD boron nitride thin films
M. Anutgan, T. Aliyeva Anutgan, E. Ozkol, I. Atilgan, B. KatirciogluVolume:
355
Year:
2009
Language:
english
DOI:
10.1016/j.jnoncrysol.2009.05.053
File:
PDF, 689 KB
english, 2009