Large area uniformity of plasma grown hydrogenated...

Journal of Non-Crystalline Solids 2010 Vol. 356; Iss. 23-24

Large area uniformity of plasma grown hydrogenated nanocrystalline silicon and its application in TFTs

Tamila Aliyeva Anutgan, Mustafa Anutgan, Ismail Atilgan, Bayram Katircioglu
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Volume:
356
Year:
2010
Language:
english
DOI:
10.1016/j.jnoncrysol.2010.04.012
File:
PDF, 933 KB
english, 2010
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