Distribution of hydrogen in low temperature passivated...

Distribution of hydrogen in low temperature passivated amorphous silicon (a-Si:H) films from neutron reflectivity

Bryan D. Vogt, Barry O'Brien, David R. Allee, Doug Loy, Bulent Akgun, Sushil K. Satija
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Volume:
357
Year:
2011
Language:
english
DOI:
10.1016/j.jnoncrysol.2010.11.030
File:
PDF, 447 KB
english, 2011
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