Influence of the deposition parameters on the...

Journal of Non-Crystalline Solids 2011 Vol. 357; Iss. 21

Influence of the deposition parameters on the microstructure and opto-electrical properties of hydrogenated nanocrystalline silicon films by HW-CVD

V.S. Waman, M.M. Kamble, M.R. Pramod, S.P. Gore, A.M. Funde, R.R. Hawaldar, D.P. Amalnerkar, V.G. Sathe, S.W. Gosavi, S.R. Jadkar
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Volume:
357
Year:
2011
Language:
english
DOI:
10.1016/j.jnoncrysol.2011.07.002
File:
PDF, 1.33 MB
english, 2011
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