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Optical properties and chemical bonding characteristics of amorphous SiNX:H thin films grown by the plasma enhanced chemical vapor deposition method
Yin He, Yuanzhe Wang, Wang Li, Weizhi Han, Zhijuan Hu, Xiaomei Qin, Guoping Du, Wangzhou ShiVolume:
358
Year:
2012
Language:
english
DOI:
10.1016/j.jnoncrysol.2011.10.016
File:
PDF, 1.26 MB
english, 2012