Optical and structural properties of hydrogenated silicon...

Optical and structural properties of hydrogenated silicon films prepared by rf-magnetron sputtering at low growth temperatures: Study as function of argon gas dilution

Y. Bouizem, K. Kefif, J.D. Sib, D. Benlakehal, A. Kebab, A. Belfedal, L. Chahed
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Volume:
358
Year:
2012
Language:
english
DOI:
10.1016/j.jnoncrysol.2011.12.077
File:
PDF, 614 KB
english, 2012
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