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A study of silicon oxynitride film prepared by ion beam assisted deposition
Yongjin Wang, Xinli Cheng, Zhilang Lin, Changsheng Zhang, Haibo Xiao, Feng Zhang, Shichang ZouVolume:
58
Year:
2004
Language:
english
DOI:
10.1016/j.matlet.2004.02.007
File:
PDF, 417 KB
english, 2004